| Scan type |
Fast axis source |
Slow axis source |
Lower 16 bits of PCI-6534 Delta Tau input |
Upper 16 bits of PCI-6534 Delta Tau input |
| Piezo |
NI PCI-6534 (piezo) |
NI PCI-6534 (piezo) |
XPZT |
YPZT |
| Focus |
NI PCI-6534 (piezo) |
NI PCI-6534 (ZSTG) |
XPZT or YPZT |
ZSTG |
| Contrast |
NI PCI-6534 (piezo) |
EPICS stepper (wavelength),
NI PCI-6534 (ZSTG) |
XPZT or YPZT |
ZSTG |
| Stepper |
MM-3000 stepper |
MM-3000 stepper |
Ignored |
ZSTG |
| Stepper with ZSTG slow axis |
MM-3000 stepper |
NI PCI-6534 (ZSTG) |
Ignored |
ZSTG |
| Spectrum |
EPICS stepper |
Not applicable |
Ignored |
ZSTG |
|