The STXM V interlock

The STXM V interlock box includes an interlock for pumping/ venting the chamber and an motor interlock which protects the piezo stage and ZSTG from damage due to a moving detector. Note that the Newport MM3000 was replaced by the Newport XPS on only the inboard microscope (as of this writing, 1/14/2008).



Subsections

Holger Fleckenstein 2008-07-08