Motors

The list of motorized stages driven by the XPS-C8 is shown in Tab. 11.1, the motion characteristics of these stages are shown in Tab. 11.2, and the electrical characteristics of the motors involved are shown in Tab. 11.3. The systems for inboard and outboard are identical.

Table 11.1: Motor types and drivers. The driver for all stepper motors is XPS-DRV01. Note: ZSTG will in fact be controlled by the Delta Tau PMAC and driven by an ACS driver (see Tab. 1.1).

	Slot	Stage	Motor
XSTG	1	UTM100PE1	UE31PE
YSTG	2	UZM80PP.1	UE41PP
ZSTG	NA	MFN25PP	UE16PP
XDET	3	MTM250PP1HL	UE63PP
YDET	4	UZM80PP.1	UE41PP
ZDET	5	UTM50PP1HL	UE41PP
ZOSA	6	MFN08PP	UE16PP

Table 11.2: Encoder resolution directions of motion. The encoder resolution is at the same time, the interval in which we have the XPS send out pulses to trigger the data acquisition (see 11.4). Note that the ZOSA and ZSTG motors have as their home positions the limit switch position of the stage at the travel limit where the stage is closest to the motor. The others have true home switches.

	Encoder Resolution [$\mu$m]	STXM +dir	XPS +dir	Home
XSTG	1.0	outboard	inboard	outboard
YSTG	0.10	up	up	middle
ZSTG	0.074004	downstream	upstream	downstream
ZOSA	0.074004	downstream	downstream	upstream
XDET	1.0	outboard	inboard	middle
YDET	0.10	up	up	middle
ZDET	1.0	downstream	upstream	downstream

Table 11.3: Electrical characteristics of the motors used in the Newport motorized stages. From p. 5.14 of the 2000 Newport Motion Control catalog.

	UE63PP	UE62PP	UE41PP	UE31PP	UE16PP
Maximum driver voltage (V)	60	60	60	30	30
Nominal current (A)	2.9	1.8	1.2	0.56	0.25
Resistance/phase ($\Omega$)	1.2	2.6	3.0	7.6	12.5
Inductance/phase (mH)	2.0	4.9	4.3	8.4	5.5
Steps per revolution	200	200	200	100	24
Max slew rate (steps/sec)	4000	3000	4000	4000	2000
Gear ratio	1:1	1:1	1:1 or 1:10	1:1 or 1:20	1:141 or 1:262
Phases	2	2	2	2	2
Wires	6	6	6	6	4