Newport MM-3000 motor controllers
The list of motorized stages driven by Newport MM-3000 controllers
is shown in Table 10.1, the motion
characteristics of these stages are shown in Table
10.2, and the electrical characteristics of the motors
involved are shown in Table 10.3.
Table 10.1:
Motor types and drivers.
The MM-3000 serial numbers and firmware versions
are: STG 1=1495 (firmware 2.5),
DET 1=1497 (firmware 2.5),
STG 2=1990 (firmware 2.9),
DET 2=1991 (firmware 2.9),
STG Cryo=1927 (firmware 2.9).
Eproms with upgrade to firmware 3.1 have been ordered on
10-15-99. Note: the motors ZSTG 1 and ZSTG 2 will
in fact be controlled by the Delta Tau board and ACS
driver (see Table 1.1).
| Motor |
Slot |
Stage |
Motor |
Driver S/N |
|---|
| XSTG 1 |
STG1-4 |
UTM100PE1 |
UE31PE |
A B1 3169 |
| YSTG 1 |
STG1-3 |
UZM80PP.1 |
UE41PP |
B B1 3165 |
| ZSTG 1 |
STG1-2 |
MFN25PP |
UE16PP |
D B1 3162 |
| ZOSA 1 |
STG1-1 |
MFN08PP |
UE16PP |
D B1 3161 |
| XDET 1 |
DET1-1 |
MTM250PP1HL |
UE63PP |
N B1 3164 |
| YDET 1 |
DET1-2 |
UZM80PP.1 |
UE41PP |
B C 2229 |
| ZDET 1 |
DET1-3 |
UTM50PP1HL |
UE41PP |
? B1 3163 |
| XSTG 2 |
STG2-4 |
UTM100PE1 |
UE31PE |
AC 5120 |
| YSTG 2 |
STG2-3 |
UZM80PP.1 |
UE41PP |
BC 5092 |
| ZSTG 2 |
STG2-2 |
MFN25PP |
UE16PP |
DC 5094 |
| ZOSA 2 |
DET2-1 |
MFN08PP |
UE16PP |
DC 5093 |
| XDET 2 |
DET2-1 |
MTM250PP1HL |
UE63PP |
NC 5089 |
| YDET 2 |
DET2-2 |
UZM80PP.1 |
UE41PP |
BC 5103 |
| ZDET 2 |
DET2-3 |
UTM50PP1HL |
UE41PP |
BC 5121 |
| Cryo XSTG |
|
UT100-25-1 um |
UE31PP |
|
| Cryo YSTG |
|
UZ160-9-1 um |
UE72PP |
|
| Cryo ZSTG |
|
MFN25PP |
UE16PP |
|
|
Table 10.2:
Motor
calibration factors and directions of motion.
Calibration factors were measured using a micrometer
to gauge distance of travel. Note that the ZOSA and ZSTG
motors have as their home positions the limit switch
position of the stage at the travel limit where the stage
is closest to the motor. The others have true home
switches.
| |
 m per |
m per |
Program |
MM-3000 |
Home |
|---|
| Motor |
step |
encoder |
+ dir. |
+ dir |
pos. |
|---|
| XSTG |
0.10 |
1.0 |
outboard |
inboard |
outboard |
| YSTG |
0.10 |
0.10 |
up |
up |
middle |
| ZSTG |
0.0148 |
0.074 |
downstream |
upstream |
downstream |
| ZOSA |
0.0148 |
0.074 |
downstream |
downstream |
upstream |
| XDET |
1.0 |
1.0 |
outboard |
inboard |
middle |
| YDET |
0.10 |
0.10 |
up |
up |
middle |
| ZDET |
1.12 |
1.12 |
downstream |
upstream |
downstream |
| Cryo XSTG |
0.10 |
0.10 |
- |
- |
- |
| Cryo YSTG |
0.10 |
0.10 |
- |
- |
- |
| Cryo ZSTG |
0.0148 |
0.074 |
downstream |
downstream |
upstream |
|
Table 10.3:
Electrical
characteristics of the motors used in the Newport motorized
stages. From p. 5.14 of the 2000 Newport Motion Control
catalog.
| |
UE72PP |
UE63PP |
UE62PP |
UE41PP |
UE31PP |
UE16PP |
|---|
| Maximum driver voltage (V) |
|
60 |
60 |
60 |
30 |
30 |
| Nominal current (A) |
|
2.9 |
1.8 |
1.2 |
0.56 |
0.25 |
Resistance/phase ( ) |
|
1.2 |
2.6 |
3.0 |
7.6 |
12.5 |
| Inductance/phase (mH) |
|
2.0 |
4.9 |
4.3 |
8.4 |
5.5 |
| Steps per revolution |
|
200 |
200 |
200 |
100 |
24 |
| Max slew rate (steps/sec) |
|
4000 |
3000 |
4000 |
4000 |
2000 |
| Gear ratio |
|
1:1 |
1:1 |
1:1 or 1:10 |
1:1 or 1:20 |
1:141 or 1:262 |
| Phases |
|
2 |
2 |
2 |
2 |
2 |
| Wires |
|
6 |
6 |
6 |
6 |
4 |
|
Subsections
Holger Fleckenstein
2008-07-08
