How to find and record the X-ray focus
We assume that you have prefocused your sample with the VLM (Sec.
2.4, and so you should be within 100
microns of the X-ray focus.
- Take an overview scan and locate a clearly visible
feature with a sharp edge. Move to this edge.
- Take a horizontal or vertical focus scan (predefined scans
under Scan in the menubar of the SM_GUI main
window). At first, you might want to take a rather coarse scan
(large steps in X and Z) unless you are already focused quite
well.
- Locate the focus, click on it and press the button
Move scan devices to mouse.
- Repeat the two steps above with finer scan steps until you
are focused well. In the end, the X or Y step size should be
smaller than the resolution of the focusing zone plate (on the
order of 40nm), and the Z step size should be smaller than the
depth of focus (which is on the order of 1micron).
- Record the focus with Alignment
Edit Alignment
Record specimen in X-ray focus
(NOT the VLM focus!!!).
- Save the alignment file with Alignment
Write Alignment File, in case you get thrown out from or exit the program.
Holger Fleckenstein
2008-07-08