Determining the drift parameters

To figure out what the tilt is, do the following:

1. Go to Alignment $\rightarrow$ Edit Alignment $\rightarrow$ Record Advanced and set both drift parameters (dx/dz) and (dy/dz) to 0.0. Don't forget to click Drift: Record Parameters.
2. Take an high resolution image (e.g. 150 by 150 pixels, 0.1 $\mu$m steps) of a sample with an easily localizable feature (like the corner of a grid bar) at two distinctly different energies (like 280eV and 320 eV). The feature (even though it drifted) needs to be visible in both images.
3. For both images click on the feature and write down this pixels $X$ and $Y$ positions as given in the fields for Abs. microns. Also write down the scans' $Z$ positions as given in File $\rightarrow$ Display Scan Parameters as Center(um).
4. Find the relative drift in $X$ and $Y$ directions by calculating $\Delta X/\Delta Z$ and $\Delta Y/\Delta Z$
5. If you are lazy, you can let the computer calculate the drift parameters for you: Once you have recorded the two images, just go to Edit Alignment $\rightarrow$ Record Advanced. With the first drift image open click Drift: Set Current as Image1. Then open the second image (without closing the Edit Alignment window!) and click Drift: Set Current as Image2. Hitting Drift: Calculate Parameters will then do the math for you. It will use edge enhancement in aligning the two images, if you check either the Sobel or Roberts algorithm. This may lead to slightly different results.

Now you have determined the drift parameters and have two options how to correct for them: