| Description | Type | PLC | Note | Connector |
| V1 power | AC output | O:1/0 | ||
| V3 power | AC output | O:1/13 | ||
| V4i power | AC output | O:1/2 | ||
| V5i power | AC output | O:1/3 | ||
| V7i power | AC output | O:1/4 | ||
| V9i power | AC output | O:1/5 | ||
| V10i power | AC output | O:1/6 | ||
| V11i power | AC output | O:1/7 | ||
| V4o power | AC output | O:1/8 | ||
| V5o power | AC output | O:1/9 | ||
| V7o power | AC output | O:1/10 | ||
| V9o power | AC output | O:1/11 | ||
| V10o power | AC output | O:1/12 | ||
| Shutter open LED (MP+EP's) | DC output | O:3/0 | C23/1, 4 | |
| Shutter closed LED (MP+EP's) | DC output | O:3/1 | C23/2, 5 | |
| DC output | O:3/2 | |||
| DC output | O:3/3 | |||
| X1A active LED (MP) | DC output | O:3/4 | ||
| X1A inactive LED (MP) | DC output | O:3/5 | ||
| X1B active LED (MP) | DC output | O:3/6 | ||
| X1B inactive LED (MP) | DC output | O:3/7 | ||
| Override on LED | DC output | O:3/8 | ||
| Override off LED | DC output | O:3/9 | ||
| V1 open LED | DC output | O:3/10 | ||
| V1 closed LED | DC output | O:3/11 | ||
| V2 open LED | DC output | O:3/12 | ||
| V2 closed LED | DC output | O:3/13 | ||
| V3 open LED | DC output | O:3/14 | ||
| V3 closed LED | DC output | O:3/15 | ||
| V4i open LED | DC output | O:3/16 | ||
| V4i closed LED | DC output | O:3/17 | ||
| V5i open LED | DC output | O:3/18 | ||
| V5i closed LED | DC output | O:3/19 | ||
| V7i open LED | DC output | O:3/20 | ||
| V7i closed LED | DC output | O:3/21 | ||
| V9i open LED (MP+EP) | DC output | O:3/22 | C18/5 | |
| V9i closed LED (MP+EP) | DC output | O:3/23 | C18/6 | |
| V10i open LED (MP+EP) | DC output | O:3/24 | C19/5 | |
| V10i closed LED (MP+EP) | DC output | O:3/25 | C19/6 | |
| V11i open LED (MP+EP) | DC output | O:3/26 | C20/5 | |
| V11i closed LED (MP+EP) | DC output | O:3/27 | C20/6 | |
| V4o open LED | DC output | O:3/28 | ||
| V4o closed LED | DC output | O:3/29 | ||
| V5o open LED | DC output | O:3/30 | ||
| V5o closed LED | DC output | O:3/31 | ||
| V7o open LED | DC output | O:4/0 | ||
| V7o closed LED | DC output | O:4/1 | ||
| V9o open LED (MP+EP) | DC output | O:4/2 | C21/5 | |
| V9o closed LED (MP+EP) | DC output | O:4/3 | C21/6 | |
| V10o open LED (MP+EP) | DC output | O:4/4 | C22/5 | |
| V10o closed LED (MP+EP) | DC output | O:4/5 | C22/6 | |
| Air flow ok LED | DC output | O:4/6 | ||
| Air flow bad LED | DC output | O:4/7 | ||
| Water flow : beam stop, M0 ok LED | DC output | O:4/8 | ||
| Water flow: beam stop, M0 bad LED | DC output | O:4/9 | ||
| Water flow: ESM, M1i, M1o, ENSi, ENSo ok LED | DC output | O:4/10 | ||
| Water flow: ESM, M1i, M1o, ENSi, ENSo bad LED | DC output | O:4/11 | ||
| Water flow: SGMi ok LED | DC output | O:4/12 | ||
| Water flow: SGMi bad LED | DC output | O:4/13 | ||
| Water flow: SGMo ok LED | DC output | O:4/14 | ||
| Water flow: SGMo bad LED | DC output | O:4/15 | ||
| M0 in LED | DC output | O:4/16 | ||
| M0 out LED | DC output | O:4/17 | ||
| He box open LED | DC output | O:4/18 | ||
| He box in place LED | DC output | O:4/19 | ||
| FE: Enable shutter NO | Relay output | O:2/0 | closed when ok to open mask/shutter | C16/1 |
| FE: Enable shutter NC | Relay output | O:2/1 | open when ok to open mask/shutter | C16/3 |
| FE: X1A active | Relay output | O:2/2 | closed when X1A active | C16/4 |
| FE: X1B active | Relay output | O:2/3 | closed when X1B active | C16/6 |
| M0 fully retracted | Relay output | O:2/4 | closed when M0 fully retracted | C14/4 |
| X1B: G2 gauge | Relay output | O:2/5 | closed when G2 below setpoint | C17/5 |
| X1B: Shutter closed | Relay output | O:2/6 | closed when mask/shutter open | C17/8 |
| FE: FE gauge | Switch input | I:5/0 | closed when pressure below setpoint | |
| G1 gauge | Switch input | I:5/1 | ||
| G2 gauge | Switch input | I:5/2 | ||
| G3 gauge | Switch input | I:5/3 | ||
| G4 gauge | Switch input | I:5/4 | ||
| G5i gauge | Switch input | I:5/5 | ||
| G6i gauge | Switch input | I:5/6 | ||
| G8i gauge | Switch input | I:5/7 | ||
| G9i gauge | Switch input | I:5/8 | ||
| G10i gauge | Switch input | I:5/9 | ||
| G11i gauge | Switch input | I:5/10 | ||
| G12i gauge | Switch input | I:5/15 | ||
| G5o gauge | Switch input | I:5/11 | ||
| G6o gauge | Switch input | I:5/12 | ||
| G8o gauge | Switch input | I:5/13 | ||
| G9o gauge | Switch input | I:5/14 | ||
| G11o gauge | Switch input | I:5/16 | ||
| FE: Shutter closed status | Switch input | I:5/17 | closed when shutter open | |
| FE: Autoshutter status | Switch input | I:5/18 | connected but not used | |
| V1 open status | Switch input | I:5/19 | ||
| V1 closed status | Switch input | I:5/20 | ||
| V2 open status | Switch input | I:5/21 | closed when V2 fully open | |
| V3 open status | Switch input | I:5/22 | ||
| V3 closed status | Switch input | I:5/23 | ||
| V4i open status | Switch input | I:5/24 | ||
| V4i closed status | Switch input | I:5/25 | ||
| V5i open status | Switch input | I:5/26 | ||
| V5i closed status | Switch input | I:5/27 | ||
| Switch input | I:5/28 | |||
| Switch input | I:5/29 | |||
| V7i open status | Switch input | I:5/30 | ||
| V7i closed status | Switch input | I:5/31 | ||
| V9i open status | Switch input | I:6/0 | ||
| V9i closed status | Switch input | I:6/1 | ||
| V10i open status | Switch input | I:6/2 | ||
| V10i closed status | Switch input | I:6/3 | ||
| V11i open status | Switch input | I:6/4 | ||
| V11i closed status | Switch input | I:6/5 | ||
| V4o open status | Switch input | I:6/6 | ||
| V4o closed status | Switch input | I:6/7 | ||
| V5o open status | Switch input | I:6/8 | ||
| V5o closed status | Switch input | I:6/9 | ||
| Switch input | I:6/10 | |||
| Switch input | I:6/11 | |||
| V7o open status | Switch input | I:6/12 | ||
| V7o closed status | Switch input | I:6/13 | ||
| V9o open status | Switch input | I:6/14 | ||
| V9o closed status | Switch input | I:6/15 | ||
| V10o open status | Switch input | I:6/16 | ||
| V10o closed status | Switch input | I:6/17 | ||
| V1 open action | Switch input | I:6/18 | ||
| V1 closed action | Switch input | I:6/19 | ||
| V3 open action | Switch input | I:6/20 | ||
| V3 closed action | Switch input | I:6/21 | ||
| V4i open action | Switch input | I:6/22 | ||
| V4i closed action | Switch input | I:6/23 | ||
| V5i open action | Switch input | I:6/24 | ||
| V5i closed action | Switch input | I:6/25 | ||
| V7i open action | Switch input | I:6/26 | ||
| V7i closed action | Switch input | I:6/27 | ||
| V9i open action | Switch input | I:6/28 | ||
| V9i closed action | Switch input | I:6/29 | ||
| V10i open action | Switch input | I:6/30 | ||
| V10i closed action | Switch input | I:6/31 | ||
| V11i open action | Switch input | I:7/0 | ||
| V11i closed action | Switch input | I:7/1 | ||
| V4o open action | Switch input | I:7/2 | ||
| V4o closed action | Switch input | I:7/3 | ||
| V5o open action | Switch input | I:7/4 | ||
| V5o closed action | Switch input | I:7/5 | ||
| V7o open action | Switch input | I:7/6 | ||
| V7o closed action | Switch input | I:7/7 | ||
| V9o open action | Switch input | I:7/8 | ||
| V9o closed action | Switch input | I:7/9 | ||
| V10o open action | Switch input | I:7/10 | ||
| V10o closed action | Switch input | I:7/11 | ||
| V1 override action | Switch input | I:7/12 | closed when override on | |
| V3 override action | Switch input | I:7/13 | ||
| V4i override action | Switch input | I:7/14 | ||
| V5i override action | Switch input | I:7/15 | ||
| V7i override action | Switch input | I:7/16 | ||
| V9i override action | Switch input | I:7/17 | ||
| V10i override action | Switch input | I:7/18 | ||
| V11i override action | Switch input | I:7/19 | ||
| V4o override action | Switch input | I:7/20 | ||
| V5o override action | Switch input | I:7/21 | ||
| V7o override action | Switch input | I:7/22 | ||
| V9o override action | Switch input | I:7/23 | ||
| V10o override action | Switch input | I:7/24 | ||
| low air buz override action | Switch input | I:7/25 | ||
| Switch input | I:7/26 | |||
| Air pressure | Switch input | I:7/27 | closed when air ok | |
| Water flow: beam stop, M0 | Switch input | I:7/28 | closed when water flow ok | |
| Water flow: ESM, M1i, M1o, ENSi, ENSo | Switch input | I:7/29 | ||
| Water flow: SGMi | Switch input | I:7/30 | ||
| Water flow: SGMo | Switch input | I:7/31 | ||
| DSTXM beam accessible | Switch input | I:8/0 | He box in place | |
| Status: DSTXM or Holography | Switch input | I:8/1 | closed = DSTXM, open = Holo | |
| Status: CryoSTXM or Diffraction | Switch input | I:8/2 | closed = Cryo, open = Diff. | |
| X1B: Enable shutter | Switch input | I:8/3 | C17/1 | |
| X1B: X1B active | Switch input | I:8/4 | C17/3 | |
| M0 fully retracted NC | Switch input | I:8/5 | open when fully retracted | C14/5 |
| M0 fully retraced NO | Switch input | I:8/6 | closed when fully retracted | C14/2 |
| V9i EP open action | Switch input | I:8/7 | C18/1 | |
| V9i EP close action | Switch input | I:8/8 | C18/3 | |
| V10i EP open action | Switch input | I:8/9 | C19/1 | |
| V10i EP close action | Switch input | I:8/10 | C19/3 | |
| V11i EP open action | Switch input | I:8/11 | C20/1 | |
| V11i EP close action | Switch input | I:8/12 | C20/3 | |
| V9o EP open action | Switch input | I:8/13 | C21/1 | |
| V9o EP close action | Switch input | I:8/14 | C21/3 | |
| V10o EP open action | Switch input | I:8/15 | C22/1 | |
| V10o Ep close action | Switch input | I:8/16 | C22/3 | |
| inboard operation enable keylock | Switch input | I:8/17 | closed when enabled | |
| outboard operation enable keylock | Switch input | I:8/18 | closed when enabled |