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Removal of the sample holder form the vacuum chamber

  1. Close V9i.
  2. Make sure that Valve C (EVA valve with yellow handle) on the downstream side of the vacuum chamber between the chamber and the prepump line is closed. Also make sure that Valve B between turbo and airlock is closed.
  3. Move the z motor upstream in order to remove ZP and OSA from the sample holder.
  4. Unscrew the lock nut until the notch is facing up. Close the shutter on the holder.
  5. Pull the sample holder straight out of the scanning stage. Keep pulling it until it hits the stop in the airlock. It is helpful to look inside the chamber to make sure the holder is being pulled straight.
  6. Turn the holder counterclockwise by 90 degrees to close the gate valve in the airlock. DO NOT PULL IT OUT ANY FURTHER since this would results in venting the chamber. Make sure the gate valve is closed.
  7. Vent the prepump line with the appropriate up-to-air valve (green handle, Valve D). Watch the pressure in prepump line and vacuum chamber. If there is any rise of pressure in the chamber, close the venting valve again.
  8. When prepump line is vented, the holder can be safely removed.


next up previous contents
Next: Baking the vacuum chamber Up: Vacuum procedures Previous: Insertion of sample holder   Contents
Tobias Beetz 2001-04-23