Next: Baking the vacuum chamber
Up: Vacuum procedures
Previous: Insertion of sample holder
  Contents
- Close V9i.
- Make sure that Valve C (EVA valve with yellow handle) on the
downstream side of the vacuum chamber between the
chamber and the prepump line is closed. Also make sure that
Valve B between turbo and airlock
is closed.
- Move the z motor upstream in order to remove ZP and OSA
from the sample holder.
- Unscrew the lock nut until the notch is facing up. Close the
shutter on the holder.
- Pull the sample holder straight out of the scanning stage. Keep pulling
it until it hits the stop in the airlock. It is helpful to look
inside the chamber to make sure the holder is being
pulled straight.
- Turn the holder counterclockwise by 90 degrees
to close the gate valve in the airlock.
DO NOT PULL IT OUT ANY FURTHER since this
would results in venting the chamber.
Make sure the gate valve is closed.
- Vent the prepump line with the appropriate up-to-air
valve (green handle, Valve D).
Watch the pressure in prepump line and
vacuum chamber. If there is any rise of pressure in the
chamber, close the venting valve again.
- When prepump line is vented, the holder can be safely
removed.
Next: Baking the vacuum chamber
Up: Vacuum procedures
Previous: Insertion of sample holder
  Contents
Tobias Beetz
2001-04-23